US 12,351,910 B2
Hafnium aluminum oxide coatings deposited by atomic layer deposition
David Fenwick, Los Altos, CA (US); Jennifer Y. Sun, Fremont, CA (US); Cheng-Hsuan Chou, Santa Clara, CA (US); and Xiao Ming He, Fremont, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Oct. 16, 2020, as Appl. No. 17/072,301.
Claims priority of provisional application 62/924,938, filed on Oct. 23, 2019.
Prior Publication US 2021/0123143 A1, Apr. 29, 2021
Int. Cl. C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/505 (2006.01); C23F 11/02 (2006.01); C23F 11/18 (2006.01)
CPC C23C 16/45536 (2013.01) [C23C 16/40 (2013.01); C23C 16/45529 (2013.01); C23C 16/45553 (2013.01); C23C 16/45565 (2013.01); C23C 16/505 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A coated processing chamber component, to be inserted into a processing chamber, comprising:
a body;
a buffer layer deposited on the body, the buffer layer consisting essentially of silicon dioxide or aluminum nitride; and
a corrosion resistant coating, deposited on the buffer layer, comprising hafnium, aluminum, and oxygen and having a purity greater than about 99.95%, on a surface of the body, wherein the corrosion resistant coating comprises:
a first layer and a second layer, wherein the first layer comprises a first plurality of monolayers, each of the first plurality of monolayers consisting essentially of aluminum oxide, and wherein the second layer comprises a second plurality of monolayers, each of the second plurality of monolayers consisting essentially of hafnium oxide,
about 1 mol % to about 40 mol % of hafnium,
about 1 mol % to about 40 mol % of aluminum, and
about 20 mol % to about 98 mol % oxygen.