US 12,350,609 B2
Pre-wet system having pneumatic circulation
Jui-Hsiung Hsu, Taoyuan (TW); Chi-Yi Lin, Hsinchu (TW); Yu-Liang Huang, Kaohsiung (TW); and Jih-Jenn Huang, Hsinchu (TW)
Assigned to Hermes-Epitek Corporation, Taipei (TW)
Filed by HERMES-EPITEK CORPORATION, Taipei (TW)
Filed on Sep. 16, 2022, as Appl. No. 17/946,969.
Claims priority of application No. 110134890 (TW), filed on Sep. 17, 2021.
Prior Publication US 2023/0090558 A1, Mar. 23, 2023
Int. Cl. B01D 29/66 (2006.01); B01D 29/60 (2006.01); B01D 35/157 (2006.01); B01D 35/16 (2006.01); B01D 36/00 (2006.01)
CPC B01D 29/668 (2013.01) [B01D 29/605 (2013.01); B01D 35/1573 (2013.01); B01D 35/16 (2013.01); B01D 36/00 (2013.01); B01D 2201/165 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A pre-wet system, comprising:
a piping system;
a storage tank containing a solvent;
a filter connected to the piping system;
a first gas for driving the solvent in the storage tank to the filter via the piping system;
a first buffer tank connected to the filter via the piping system to store the solvent discharged from the filter;
a second buffer tank connected to the filter via the piping system to store the solvent discharged through the filter;
a second gas for selectively driving the solvent in the first buffer tank to return to the filter and then to be discharged to the second buffer tank via the piping system, or the second gas selectively driving the solvent in the second buffer tank to return to the filter and then to be discharged to the first buffer tank via the piping system; and
a control system that determines a path of the solvent wherein the first buffer tank further comprises: a high-level sensor connected to the control system; and a low-level sensor connected to the control system; wherein: when the high-level sensor detects that the solvent in the first buffer tank reaches a high level, the second gas drives the solvent in the first buffer tank to return to the filter and then to be discharged to the second buffer tank via the piping system; when the low-level sensor detects that the solvent in the first buffer tank reaches a low level, the second gas drives the solvent in the second buffer tank to return to the filter and then to be discharged to the first buffer tank via the piping system.