US 11,057,963 B2
Lamp infrared radiation profile control by lamp filament design and positioning
Zhepeng Cong, Vancouver, WA (US); and Schubert S. Chu, San Francisco, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 13, 2018, as Appl. No. 16/129,879.
Claims priority of provisional application 62/569,210, filed on Oct. 6, 2017.
Prior Publication US 2019/0110336 A1, Apr. 11, 2019
Int. Cl. H05B 3/00 (2006.01); H01K 1/32 (2006.01); H01L 21/67 (2006.01); H01K 1/46 (2006.01); H01K 1/58 (2006.01); H01K 7/00 (2006.01)
CPC H05B 3/0047 (2013.01) [H01K 1/32 (2013.01); H01K 1/46 (2013.01); H01K 1/58 (2013.01); H01K 7/00 (2013.01); H01L 21/67115 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus operable to heat a substrate, comprising:
a first annular lamp array, comprising:
two or more lamp subgroups operable to provide radiant energy to heat a substrate, comprising:
a first lamp subgroup, comprising:
a first plurality of lamps, wherein each lamp of the first plurality of lamps comprises:
 a first envelope having a first end and a second end;
 a base coupled with the first end of the first envelope to support the first envelope; and
 a first filament positioned along a longitudinal axis extending from the first end of the first envelope to the second end of the first envelope, wherein each lamp of the first plurality of lamps has at least one characteristic of the following set of characteristics: the first filament has a first length, an end of the first filament is positioned a first distance from the first end of the first envelope, the first filament has a first number of coils, and the first envelope comprises a first opaque portion positioned a second distance from the first end of the first envelope; and
a first lamp driving circuit electrically coupled with and operable to control the first plurality of lamps in the first lamp subgroup; and
a second lamp subgroup, comprising:
a second plurality of lamps, wherein each lamp of the second plurality of lamps comprises:
 a second envelope having a first end and a second end;
 a base coupled with the first end of the second envelope to support the second envelope; and
 a second filament positioned along a longitudinal axis extending from the first end of the second envelope to the second end of the second envelope, wherein each lamp of the second plurality of lamps has at least one characteristic of the following set of characteristics: the second filament has a second length, the end of the second filament is positioned a third distance from the first end of the second envelope, the second filament has a second number of coils, and the second envelope comprises a second opaque portion positioned a fourth distance from the first end of the second envelope; and
a second lamp driving circuit electrically coupled with and operable to control the second plurality of lamps in the second lamp subgroup,
 wherein the first lamp driving circuit is independently controllable relative to the second lamp driving circuit, and
 wherein the at least one characteristic of the first lamp subgroup differs from the at least one characteristic of the second lamp subgroup.