US 11,056,677 B2
Display substrate, method and device for manufacturing display substrate, and display device
Yuanqi Zhang, Beijing (CN); and Peng Xu, Beijing (CN)
Assigned to BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN); and CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO, LTD., Sichuan (CN)
Filed by BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN); and CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Sichuan (CN)
Filed on Oct. 10, 2018, as Appl. No. 16/156,056.
Claims priority of application No. 201810089790.3 (CN), filed on Jan. 30, 2018.
Prior Publication US 2019/0237710 A1, Aug. 1, 2019
Int. Cl. H01L 51/00 (2006.01); H01L 51/56 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01)
CPC H01L 51/56 (2013.01) [C23C 14/042 (2013.01); H01L 51/001 (2013.01); H01L 51/0011 (2013.01); H01L 51/0021 (2013.01); C23C 14/24 (2013.01); H01L 2251/566 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for manufacturing a display substrate, comprising:
shielding a to-be-cut region of a to-be-evaporated substrate with a shielding member; and
evaporating a common layer material onto the to-be-evaporated substrate to form a common layer of the display substrate,
wherein the display substrate comprises the to-be-cut region and a display region surrounding the to-be-cut region, and the common layer material is deposited onto the display region rather than the to-be-cut region;
wherein the shielding the to-be-cut region of the to-be-evaporated substrate with the shielding member and evaporating the common layer material onto the to-be-evaporated substrate to form the common layer of the display substrate comprises:
placing the shielding member into an evaporation chamber after placing the to-be-evaporated substrate into the evaporation chamber, and attaching the shielding member to the to-be-cut region;
placing a metal mask plate used in the formation of the common layer into the evaporation chamber, and aligning the metal mask plate with the to-be-evaporated substrate; and
evaporating the common layer material onto the to-be-evaporated substrate to form the common layer of the display substrate;
wherein the shielding member and the metal mask plate are made of different materials; and wherein the shielding member and the metal mask plate are placed into the evaporation chamber sequentially.