US 11,056,638 B2
Method of manufacturing an inkjet print head and an inkjet print head with induced crystal phase change actuation
Franciscus R. Blom, Venlo (NL)
Assigned to CANON PRODUCTION PRINTING HOLDING B.V., Venlo (NL)
Filed by Océ Holding B.V., Venlo (NL)
Filed on Dec. 5, 2019, as Appl. No. 16/704,471.
Application 16/704,471 is a continuation of application No. PCT/EP2018/065228, filed on Jun. 8, 2018.
Claims priority of application No. 17177308 (EP), filed on Jun. 22, 2017.
Prior Publication US 2020/0111947 A1, Apr. 9, 2020
Int. Cl. B41J 2/14 (2006.01); H01L 41/083 (2006.01); B41J 2/16 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H01L 41/187 (2006.01); H01L 41/25 (2013.01)
CPC H01L 41/0838 (2013.01) [B41J 2/14233 (2013.01); B41J 2/161 (2013.01); H01L 41/081 (2013.01); H01L 41/0973 (2013.01); H01L 41/1876 (2013.01); H01L 41/25 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method for manufacturing an inkjet print head, wherein the method comprises the steps of:
determining a misfit strain-electric field crystal phase relation for at least one composition of a piezoelectric material;
selecting a misfit strain value and a composition of the piezoelectric material based on the determined misfit strain-electric field crystal phase relation for said at least one composition such that, with a predetermined change in electric field, a crystal phase change in the piezoelectric material is induced; and
based on the selected misfit strain value and the selected composition of the piezoelectric material, forming a base layer and an actuator stack on the base layer, the actuator stack comprising the piezoelectric material, wherein the base layer and the actuator stack have predetermined properties providing the selected misfit strain value and the selected composition of the piezoelectric material.