US 11,056,605 B2
Detection panel and manufacturing method thereof
Hao Cheng, Beijing (CN); Yanfei Chi, Beijing (CN); Xinmao Qiu, Beijing (CN); Zihua Zhuang, Beijing (CN); Jin Wang, Beijing (CN); Changhong Shi, Beijing (CN); Min Zhou, Beijing (CN); Yaochao Lv, Beijing (CN); Yao Liu, Beijing (CN); and Xi Chen, Beijing (CN)
Assigned to FUZHOU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Fuzhou (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Filed by FUZHOU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Fujian (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Filed on Sep. 13, 2019, as Appl. No. 16/570,437.
Claims priority of application No. 201811290845.3 (CN), filed on Oct. 31, 2018.
Prior Publication US 2020/0135957 A1, Apr. 30, 2020
Int. Cl. H01L 31/108 (2006.01); H01L 27/146 (2006.01); G01T 1/20 (2006.01); G01T 1/00 (2006.01)
CPC H01L 31/1085 (2013.01) [G01T 1/2018 (2013.01); H01L 27/14692 (2013.01); G01T 1/003 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A detection panel, comprising:
a photosensitive element, configured to sense a first light beam incident to the photosensitive element to generate a photosensitive signal;
a drive circuit, configured to be coupled to the photosensitive element to acquire the photosensitive signal from the photosensitive element, wherein the drive circuit comprises a switch element;
a reflective grating, which is on a side of the drive circuit where the first light beam is incident, and is configured to reflect at least a portion of the first light beam incident toward the switch element; and
a light conversion layer,
wherein the first light beam has a first wavelength, and the light conversion layer is configured to convert a second light beam which is incident on the light conversion layer into the first light beam, and the second light beam has a second wavelength smaller than the first wavelength.
 
16. A detection panel, comprising:
a photosensitive element, configured to sense a first light beam incident to the photosensitive element to generate a photosensitive signal;
a drive circuit, configured to be coupled to the photosensitive element to acquire the photosensitive signal from the photosensitive element, wherein the drive circuit comprises a switch element;
a reflective grating, which is on a side of the drive circuit where the first light beam is incident, and is configured to reflect at least a portion of the first light beam incident toward the switch element; and
a transmission grating, which is on a side of the photosensitive element where the first light beam is incident and is configured to transmit at least a portion of the first light beam incident toward the photosensitive element,
wherein the reflective grating and the transmission grating are in a same layer and are made of a same material.
 
17. A manufacturing method of a detection panel, comprising:
forming a photosensitive element, wherein the photosensitive element is configured to sense a first light beam incident to the photosensitive element to generate a photosensitive signal;
forming a drive circuit, comprising forming a switch element, wherein the drive circuit is configured to be coupled to the photosensitive element to acquire the photosensitive signal from the photosensitive element;
forming a reflective grating, wherein the reflective grating is on a side of the drive circuit where the first light beam is incident, and is configured to reflect at least a portion of the first light beam incident toward the switch element; and
forming a light conversion layer, wherein the first light beam has a first wavelength, and the light conversion layer is configured to convert a second light beam which is incident on the light conversion layer into the first light beam, and the second light beam has a second wavelength smaller than the first wavelength.