US 11,056,559 B2
Gas sensor and method for manufacturing same
Yong Ho Choa, Ansan-si (KR); Nu Si A Eom, Pyeongtaek-si (KR); Hyo Ryoung Lim, Ansan-si (KR); and Yoseb Song, Ansan-si (KR)
Assigned to INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS, Ansan-si (KR)
Filed by INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS, Ansan-si (KR)
Filed on Aug. 12, 2019, as Appl. No. 16/538,157.
Application 16/538,157 is a continuation of application No. PCT/KR2018/002927, filed on Mar. 13, 2018.
Claims priority of application No. 10-2017-0035844 (KR), filed on Mar. 22, 2017.
Prior Publication US 2019/0360958 A1, Nov. 28, 2019
Int. Cl. H01L 29/16 (2006.01); G01N 27/12 (2006.01); H01L 29/872 (2006.01); G01N 27/404 (2006.01); G01N 27/414 (2006.01); G01N 27/407 (2006.01); G01N 33/00 (2006.01); B82Y 30/00 (2011.01)
CPC H01L 29/1606 (2013.01) [G01N 27/129 (2013.01); G01N 27/4045 (2013.01); G01N 27/4074 (2013.01); G01N 27/4141 (2013.01); G01N 33/005 (2013.01); H01L 29/872 (2013.01); B82Y 30/00 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A gas sensor comprising:
a porous base substrate comprising a porous structure;
graphene disposed within the porous structure and also disposed on a surface of the porous base substrate; and
first and second electrodes disposed on the porous base substrate,
wherein the porous structure has a form of a hole extending from an upper surface toward a lower surface of the porous base substrate, and
wherein a depletion layer and a hole accumulation layer are formed between the graphene and the porous base substrate in the hole of the porous structure.