US 11,056,519 B2
Photoelectric conversion device, imaging system, and mobile apparatus
Fumihiro Inui, Yokohama (JP); Junji Iwata, Tokyo (JP); Hajime Ikeda, Yokohama (JP); Koichi Fukuda, Tokyo (JP); and Kohei Okamoto, Yokohama (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Feb. 3, 2020, as Appl. No. 16/780,666.
Claims priority of application No. JP2019-031823 (JP), filed on Feb. 25, 2019; and application No. JP2019-212961 (JP), filed on Nov. 26, 2019.
Prior Publication US 2020/0273894 A1, Aug. 27, 2020
Int. Cl. H01L 27/146 (2006.01); G06T 7/55 (2017.01)
CPC H01L 27/14607 (2013.01) [G06T 7/55 (2017.01); H01L 27/1463 (2013.01); H01L 27/1464 (2013.01); H01L 27/14627 (2013.01); H01L 27/14645 (2013.01); G06T 2207/30252 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A photoelectric conversion device comprising:
a first substrate having a first face;
a plurality of photodiodes arranged in the first substrate and each having a first region that generates signal charges by photoelectrically converting an incident light and a second region that receives the signal charges moving from the first region;
a first isolation region arranged in the first substrate at a first depth and including a first portion extending in a first direction so as to isolate the second region of one of the plurality of photodiodes from the second region of another of the plurality of photodiodes; and
a second isolation region arranged in the first substrate at a second depth deeper than the first depth with respect to the first face, and including a second portion extending in a second direction, which intersects the first direction in plan view, so as to isolate the first region of one of the plurality of photodiodes from the first region of another of the plurality of photodiodes,
wherein a part of the first portion and a part of the second portion are overlapped with each other in plan view, and
wherein, in the plan view, at least two photodiodes of the plurality of photodiodes have the same area of the second region and different areas of the first region from each other.