US 11,056,365 B2
Fault detection method in semiconductor fabrication facility
Hom-Chung Lin, Taichung (TW); Jih-Churng Twu, Hsinchu County (TW); Chin-Yun Chen, Taipei (TW); Tai-Hsiang Lin, Taichung (TW); and Yu-Chi Tsai, Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Nov. 1, 2017, as Appl. No. 15/800,586.
Claims priority of provisional application 62/563,789, filed on Sep. 27, 2017.
Prior Publication US 2019/0096723 A1, Mar. 28, 2019
Int. Cl. H01L 21/67 (2006.01); H01L 21/677 (2006.01); G01N 27/22 (2006.01); G08B 21/18 (2006.01); G08B 25/10 (2006.01); G08B 21/20 (2006.01)
CPC H01L 21/67276 (2013.01) [G01N 27/223 (2013.01); G08B 21/182 (2013.01); G08B 21/20 (2013.01); G08B 25/10 (2013.01); H01L 21/67253 (2013.01); H01L 21/67288 (2013.01); H01L 21/67733 (2013.01); H01L 21/67757 (2013.01); H01L 21/67778 (2013.01)] 20 Claims
OG exemplary drawing
1. A method for fault detection in a fabrication tool, comprising:
processing a semiconductor wafer in a fabrication tool according to a plurality of process events of a process run, wherein the process events correspond to different locations in the fabrication tool;
measuring humidity in the fabrication tool in at least one of the process events by a metrology tool positioned on a transferring member, and recording a location of the metrology tool, wherein the transferring member is moved in the fabrication tool according to the process events;
comparing the humidity measured in one of the process events with an expected humidity associated with the one of the process events;
based on the comparison, indicating an alarm condition which is indicative of a chemical leakage in the fabrication tool when a difference between the measured humidity and the expected humidity exceeds a range of acceptable values associated with the one of the process events, and determining a component that is a source of the chemical leakage;
collecting data associated with humidity in the fabrication tool in each of the process events of a previously executed process run; and
storing the data associated with humidity in an archive database, wherein the expected humidity is derived from the archive database.