US 11,056,343 B2
Providing a temporary protective layer on a graphene sheet
Deng Pan, San Diego, CA (US); and Brett Goldsmith, San Diego, CA (US)
Assigned to Cardea Bio, Inc., San Diego, CA (US)
Filed by Cardea Bio, Inc., San Diego, CA (US)
Filed on Jun. 14, 2017, as Appl. No. 15/623,295.
Claims priority of provisional application 62/350,627, filed on Jun. 15, 2016.
Claims priority of provisional application 62/359,153, filed on Jul. 6, 2016.
Prior Publication US 2017/0365477 A1, Dec. 21, 2017
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/285 (2006.01); H01L 21/306 (2006.01); H01L 21/02 (2006.01)
CPC H01L 21/2855 (2013.01) [H01L 21/02068 (2013.01); H01L 21/02373 (2013.01); H01L 21/306 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for providing a temporary layer on a graphene sheet comprising:
transferring a graphene sheet to a selected wafer;
depositing a gold layer to a first surface of the graphene sheet by dipping the graphene sheet in a gold plating solution;
patterning the graphene sheet by etching away areas of the gold layer and the graphene sheet corresponding to areas patterned in a photoresist layer using a lithography process;
packaging the patterned graphene sheet and temporary protective portions of the gold layer not etched away during the patterning of the graphene sheet into a graphene-based device, wherein the packaging comprises epoxy curing; and
removing, after packaging the graphene-based device, the temporary protective portions of gold layer by exposing the gold layer deposited to the surface of the graphene sheet to a non-acidic solution comprising potassium iodide.