US 11,055,842 B2
Method for implementing a CD-SEM characterisation technique
Patrick Quemere, Voreppe (FR); and Jérôme Hazart, Eybens (FR)
Assigned to COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Appl. No. 16/469,868
Filed by COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
PCT Filed Dec. 12, 2017, PCT No. PCT/EP2017/082427
§ 371(c)(1), (2) Date Jun. 14, 2019,
PCT Pub. No. WO2018/108912, PCT Pub. Date Jun. 21, 2018.
Claims priority of application No. 1662509 (FR), filed on Dec. 15, 2016.
Prior Publication US 2019/0318472 A1, Oct. 17, 2019
Int. Cl. G06T 7/00 (2017.01); G06T 7/60 (2017.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01)
CPC G06T 7/0006 (2013.01) [G06T 7/001 (2013.01); G06T 7/60 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30141 (2013.01); G06T 2207/30148 (2013.01); H01J 2237/2801 (2013.01); H01J 2237/2817 (2013.01)] 10 Claims
OG exemplary drawing
 
1. Method for implementing a scanning electron microscopy characterisation technique for the determination of at least one critical dimension of the structure of a sample in the field of dimensional metrology, known as CD-SEM technique, said method comprising:
producing an experimental image representative of the structure of the sample and derived from a scanning electron microscope;
from a first theoretical model based on parametric mathematical functions, calculating a second theoretical model obtained by algebraic summation of a corrective term, said corrective term being the convolution product between a given convolution kernel and the first theoretical model, said second theoretical model comprising a set of parameters to be determined, the first and second theoretical models being a mathematical representation of the structure of the sample in the experimental image;
determining the set of parameters present in the second theoretical model by means of an adjustment between said second theoretical model and said experimental image, the adjustment corresponding to a minimisation of a difference between said second theoretical model and said experimental image.