US 11,054,755 B2
Optical module with an anticollision device for module components
Joachim Hartjes, Aalen (DE); Alexander Wolf, Essingen (DE); and Toralf Gruner, Aalen-Hofen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Feb. 7, 2019, as Appl. No. 16/269,942.
Application 16/269,942 is a continuation of application No. PCT/EP2017/070056, filed on Aug. 8, 2017.
Claims priority of application No. 10 2016 214 785.4 (DE), filed on Aug. 9, 2016.
Prior Publication US 2019/0171118 A1, Jun. 6, 2019
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01); G02B 7/182 (2021.01); F16F 15/03 (2006.01); G21K 1/06 (2006.01)
CPC G03F 7/70825 (2013.01) [F16F 15/03 (2013.01); G02B 7/1828 (2013.01); G03F 7/702 (2013.01); G03F 7/709 (2013.01); G03F 7/70075 (2013.01); G03F 7/70158 (2013.01); G21K 1/06 (2013.01)] 20 Claims
OG exemplary drawing
1. An optical module, comprising:
a first component;
a second component;
a supporting structure; and
an anticollision device,
the first component is supported by the supporting structure;
the first component is arranged a distance from the second component to define a gap;
the supporting structure is configured to define a path of relative movement of the first component;
the first component is configured to move along the path of relative movement in a direction of approach relative to the second component under an influence of a defined mechanical disturbance;
the optical module is configured so that, when the anticollision device is absent or inactive, a collision between a first collision region of the first component and a second collision region of the second component occurs;
the anticollision device comprises a first anticollision unit on the first component and configured to produce a first field;
the anticollision device comprises a second anticollision unit on the second component, assigned to the first anticollision unit and configured to produce a second field;
the first and second anticollision units are configured so that, as the first component and the second component increasingly approach each other along the path of relative movement, the first field and the second field produce an increasing counter-force on the first component that counteracts the approach;
the first anticollision unit and/or the second anticollision unit comprises a plurality of anticollision elements configured to produce partial fields; and
the anticollision elements are assigned to each other so that, during use, a superimposition of their partial fields produces a field of the anticollision unit with a field line density that decreases more sharply with increasing distance from the anticollision unit along the path of relative movement than a field line density of one of the partial fields.