US 11,054,741 B2
Imprint apparatus and method of manufacturing article
Shinichi Hirano, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Sep. 14, 2018, as Appl. No. 16/131,139.
Claims priority of application No. JP2017-179006 (JP), filed on Sep. 19, 2017.
Prior Publication US 2019/0086797 A1, Mar. 21, 2019
Int. Cl. G03F 7/00 (2006.01); B29C 35/08 (2006.01); B29C 59/02 (2006.01)
CPC G03F 7/0002 (2013.01) [B29C 35/08 (2013.01); B29C 59/02 (2013.01); B29C 2035/0827 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An imprint apparatus that performs an imprint process by bringing a mold into contact with an imprint material arranged on a shot region of a substrate and curing the imprint material, the apparatus comprising:
a controller configured to:
obtain a predetermined elapsed time corresponding to an amount of elapsed time from a supplying of an imprint material to a shot region until a contact with a mold;
obtain an amount of time that will actually elapse from the supplying of the imprint material to the shot region until an expected contact with the mold;
determine whether the amount of time that will actually elapse from the supplying of the imprint material to the shot region until the expected contact with the mold falls outside an allowable range of the predetermined elapsed time; and
execute, in a case where it is determined that the amount of time that will actually elapse from the supplying of the imprint material to the shot region until the expected contact with the mold falls outside the allowable range of the predetermined elapsed time, adjustment processing such that an amount of the imprint material on the shot region is adjusted before the mold and the imprint material are brought into contact.