US 11,054,739 B2
Imprint apparatus, control method, imprint method and manufacturing method
Niyaz Khusnatdinov, Round Rock, TX (US); and Mario Johannes Meissl, Austin, TX (US)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 26, 2018, as Appl. No. 16/46,810.
Prior Publication US 2020/0033720 A1, Jan. 30, 2020
Int. Cl. G03F 7/00 (2006.01); H01L 21/324 (2006.01)
CPC G03F 7/0002 (2013.01) [H01L 21/3247 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An imprinting apparatus comprising:
a mount attached to a fixed surface;
a movable plate movable relative to the mount;
an imprint template detachably mounted to the moveable plate;
at least one electromagnetic actuator mounted between the movable plate and the mount; and
a controller configured to:
control movement of the moveable plate and the template toward or away from a substrate using the at least one electromagnetic actuator,
apply, during an idle state, an electrical current to the at least one electromagnetic actuator to maintain the imprint template at a distance from a substrate, and
apply, during a continuous imprinting state, an electrical current to the at least one electromagnetic actuator such that the imprint template contacts the substrate,
wherein a root-mean-square of the electrical current applied to the at least one electromagnetic actuator during the idle state is equal to a root-mean-square of the electrical current applied to the at least one electromagnetic actuator during the continuous imprinting state.