US 11,054,542 B2
Multi-ray-source accelerator and inspection method
Kejun Kang, Beijing (CN); Huaibi Chen, Beijing (CN); Yaohong Liu, Beijing (CN); Chuanxiang Tang, Beijing (CN); Yuanjing Li, Beijing (CN); Hao Zha, Beijing (CN); and Liang Zhang, Beijing (CN)
Assigned to Tsinghua University, Beijing (CN); and Nuctech Company Limited, Beijing (CN)
Filed by Tsinghua University, Beijing (CN); and Nuctech Company Limited, Beijing (CN)
Filed on Jul. 13, 2020, as Appl. No. 16/946,953.
Claims priority of application No. 201910644153.2 (CN), filed on Jul. 16, 2019.
Prior Publication US 2021/0018649 A1, Jan. 21, 2021
Int. Cl. G01V 5/00 (2006.01)
CPC G01V 5/0041 (2013.01) [G01V 5/0083 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A multi-ray-source accelerator, comprising:
a plurality of acceleration tubes, each acceleration tube of the plurality of acceleration tubes comprising an acceleration tube body that defines at least one cavity and comprises a first end and a second end opposite to the first end in a first direction, the plurality of acceleration tubes being arranged in at least one row along a straight line or an arc in a second direction different from the first direction and being connected in series with each other such that cavities of two adjacent acceleration tubes connected in series are in fluid communication with each other; and
a microwave unit configured to provide a microwave field to the plurality of acceleration tubes, so as to accelerate electron beams in the at least one cavity of each acceleration tube of the plurality of acceleration tubes;
wherein the plurality of acceleration tubes are arranged to allow the microwave unit to provide the microwave field from an acceleration tube at one end of the at least one row of plurality of acceleration tubes connected in series with each other, so as to accelerate electron beams in the at least one cavity of each acceleration tube of the at least one row of plurality of acceleration tubes.