US 11,054,305 B2
Method and device for beam analysis
Matthias Manger, Aalen-Unterkochen (DE); Christoph Husemann, Jena (DE); Matus Kalisky, Aalen (DE); and Lars Stoppe, Jena (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Nov. 25, 2019, as Appl. No. 16/694,115.
Application 16/694,115 is a continuation of application No. 15/918,746, filed on Mar. 12, 2018, granted, now 10,605,654.
Application 15/918,746 is a continuation of application No. PCT/EP2016/073785, filed on Oct. 5, 2016.
Claims priority of application No. 102015219330.6 (DE), filed on Oct. 7, 2015.
Prior Publication US 2020/0088571 A1, Mar. 19, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. B23K 26/04 (2014.01); G01J 1/42 (2006.01); G01J 1/04 (2006.01); G02B 27/10 (2006.01); B23K 26/03 (2006.01); B23K 26/70 (2014.01)
CPC G01J 1/4257 (2013.01) [B23K 26/032 (2013.01); B23K 26/04 (2013.01); B23K 26/705 (2015.10); G01J 1/0407 (2013.01); G01J 1/0411 (2013.01); G01J 1/0418 (2013.01); G02B 27/106 (2013.01); G02B 27/1086 (2013.01)] 22 Claims
OG exemplary drawing
1. An apparatus, comprising:
a beam-splitting optical arrangement configured to split a beam incident on the beam-splitting optical arrangement along an optical axis into a plurality of partial beams having a focus offset in a longitudinal direction relative the optical axis;
a sensor arrangement configured to capture an image of the partial beams; and
a controller configured to:
a) perform a forward simulation of the beam in the optical system based on estimated initial values for beam parameters to obtain a simulated image; and
b) calculate a set of values for the beam parameters based on a comparison between the simulated image and the measurement image,
wherein the controller is configured to:
c) iteratively perform a) and b), wherein, in each case, the calculated set of values for the beam parameters provide the basis of the forward simulation that following; and
d) output the sets of values for the beam parameters ascertained in c).