US 11,054,241 B2
Three-dimensional measurement device
Hiroyuki Ishigaki, Aichi (JP); and Takahiro Mamiya, Aichi (JP)
Assigned to CKD CORPORATION, Aichi (JP)
Filed by CKD Corporation, Aichi (JP)
Filed on Mar. 25, 2019, as Appl. No. 16/363,975.
Application 16/363,975 is a continuation of application No. PCT/JP2017/015696, filed on Apr. 19, 2017.
Claims priority of application No. JP2016-189281 (JP), filed on Sep. 28, 2016.
Prior Publication US 2019/0219379 A1, Jul. 18, 2019
Int. Cl. G01B 9/02 (2006.01); G01B 11/00 (2006.01); G01B 11/24 (2006.01)
CPC G01B 9/02011 (2013.01) [G01B 9/02 (2013.01); G01B 9/0201 (2013.01); G01B 11/00 (2013.01); G01B 2290/70 (2013.01)] 42 Claims
OG exemplary drawing
 
29. A three-dimensional measurement device comprising:
a first irradiator that emits, in a first direction, first light including first polarized light;
a second irradiator that emits, in a second direction, second light including second polarized light;
a first beam splitter that reflects, in a perpendicular direction to the first direction, at least part of the first light emitted from the first irradiator;
a second beam splitter that reflects, in a perpendicular direction to the second direction, at least part of the second light emitted from the second irradiator;
a polarizing beam splitter that:
comprises a first surface and a second surface adjacent to the first surface across a boundary surface,
receives via the first surface the reflected light from the first beam splitter as first incident light, splits the first incident light into two polarized lights having polarizing directions orthogonal to each other by reflecting part of the first incident light, radiates one of the split polarized lights as first measurement light to a measurement object and another of the split polarized lights as first reference light to a reference surface, and recombines the split polarized lights to emit combined light as first output light, and
receives via the second surface the reflected light from the second beam splitter as second incident light, splits the second incident light into two polarized lights having polarizing directions orthogonal to each other by reflecting part of the second incident light, radiates one of the split polarized lights as second measurement light to the measurement object and another of the split polarized lights as second reference light to the reference surface, and recombines the split polarized lights to emit combined light as second output light;
a first imaging system that comprises a first camera and receives the first output light emitted from the first surface of the polarizing beam splitter when at least part of the first light enters the first surface;
a second imaging system that comprises a second camera and receives the second output light emitted from the second surface of the polarizing beam splitter when at least part of the second light enters the second surface; and
an image processor that performs three-dimensional measurement of the measurement object based on interference fringe images obtained by the first imaging system and the second imaging system, wherein
the first camera obtains an image of the first output light obtained from the part of the first light emitted from the first irradiator, and simultaneously, the second camera obtains an image of the second output light obtained from the part of the second light emitted from the second irradiator, and
the images obtained by the first and second cameras are used as the interference fringe images.