US 11,054,174 B2
Semiconductor process by-product collecting device
Kyu Hyun Hwang, Osan-si (KR); Nak Jin Choi, Osan-si (KR); Tae Yeon Kim, Gangwon-do (KR); Kyung Tae Kim, Suwon-si (KR); and Che Hoo Cho, Seongnam-si (KR)
Assigned to MILAEBO CO., LTD., Pyeongtaek-si (KR)
Filed by MILAEBO CO., LTD., Pyeongtaek-si (KR)
Filed on Jan. 9, 2019, as Appl. No. 16/243,570.
Prior Publication US 2020/0217559 A1, Jul. 9, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. F24H 3/00 (2006.01); H01L 21/67 (2006.01)
CPC F24H 3/00 (2013.01) [H01L 21/67017 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for collecting a by-product in a semiconductor process, the apparatus provided on a line between a process chamber and a vacuum pump to collect a by-product in an exhaust gas, which is produced in the process chamber, the apparatus comprising:
a housing provided with a gas inlet and a gas outlet respectively provided on an upper plate and a lower plate, which are detachably coupled to upper and lower openings respectively, and configured with a passage through which gas exhausted from the process chamber flows;
a heater plate provided with multiple heat-dissipation fins, which are arranged radially with respect to a vertical direction, provided on a bottom surface of the upper plate, and heating an exhaust gas to supply energy required for chemically changing the exhaust gas introduced through the gas inlet of the upper plate and distributing the energy evenly inside the housing;
a heater power supply unit supplying a power to the heater plate;
a first upper horizontal bracket having multiple by-product collecting members, which are fixed on an upper surface of a quadrangular plate having a vertical mass gas passing opening at the center thereof in a radial direction with respect to the center point, allowing most of the exhaust gas introduced to the housing through the gas inlet of the upper plate to pass therethrough in the vertical direction, partly distributing the remaining exhaust gas evenly in the horizontal direction, and collecting a part of the by-product in a powder form;
a second upper horizontal bracket having multiple minute gas passing holes, which have a relatively small diameter and is formed at an outer perimeter of a vertical mass gas passing opening formed at the center thereof, disposed spaced apart a predetermined distance from the bottom of the first upper horizontal bracket by multiple supporters to evenly distribute the exhaust gas introduced through the first upper horizontal bracket in the horizontal and vertical directions and to collect a part of the by-product in a powder form;
a by-product collecting tower having a structure in which multiple first and second directional vertical plates having multiple horizontal gas passing holes are assembled in a lattice form in a manner that intersects each other in a direction of 90 degree angles, disposed between the second upper horizontal bracket and a lower horizontal bracket to allow the exhaust gas introduced through the second upper horizontal bracket in the vertical direction or introduced through the inner space of the housing in a lateral direction to pass in the vertical direction and collecting a part of the by-product in a powder form;
the lower horizontal bracket having multiple gas holes spaced a predetermined distance apart from each other, provided fixedly below a lower surface of the by-product collecting tower in the horizontal direction, guiding the exhaust gas vertically introduced through the by-product collecting tower toward a window, and collecting a part of the by-product contained in the exhaust gas in a powder form;
the window having a structure in which five rectangular plates having multiple gas suction holes are assembled into a rectangular shape with a bottom surface opened, configured in which the window is provided fixedly to be spaced a predetermined distance from the bottom of the lower horizontal bracket and in which a bottom surface thereof is spaced a predetermined distance apart from an upper surface of the lower plate of the housing by the multiple supporters, and blocking the by-product that passes through the by-product collecting tower and the lower horizontal bracket or flows in the lateral direction through the inner space of the housing and then is converted into the powder form from directly introducing toward a gas collecting and discharging port and guiding only the exhaust gas toward the gas collecting and discharging port; and
the gas collecting and discharging port provided at an upper portion thereof with an exhaust gas suction opening having “+” shape which is opened in four directions, disposed vertically between the inside of the window and a gas discharge opening provided on the lower plate of the housing, and collecting the exhaust gas introduced from upper, front, rear, and sides through the gas suction holes of the window and through the bottom of the window, which is opened, to discharge the exhaust gas outside,
wherein, among the multiple first and second directional vertical plates constituting the by-product collecting tower, first and second directional vertical plates located on the inner side are configured to have heights approximately ½ or ⅓ of those located on the outer side of the four sides such that a powder collecting portion having a volume of ½ or ⅓ of a total internal volume is formed in an upper portion of the inside of the by-product collecting tower.