US 11,053,583 B2
Particle reduction during sputtering deposition
James Gregory Couillard, Ithaca, NY (US); and Ming-Huang Huang, Ithaca, NY (US)
Assigned to CORNING INCORPORATED, Corning, NY (US); and VIEW, INC., Milpitas, CA (US)
Appl. No. 16/348,708
Filed by CORNING INCORPORATED, Corning, NY (US)
PCT Filed Nov. 9, 2017, PCT No. PCT/US2017/060811
§ 371(c)(1), (2) Date May 9, 2019,
PCT Pub. No. WO2018/089604, PCT Pub. Date May 17, 2018.
Claims priority of provisional application 62/420,127, filed on Nov. 10, 2016.
Prior Publication US 2019/0284681 A1, Sep. 19, 2019
Int. Cl. C23C 14/50 (2006.01); C03C 17/00 (2006.01); C23C 14/56 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC C23C 14/50 (2013.01) [C03C 17/002 (2013.01); C23C 14/564 (2013.01); H01L 21/6715 (2013.01); H01L 21/68785 (2013.01); C03C 2218/151 (2013.01); C03C 2218/154 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An article comprising:
a carrier for holding a substrate in an approximately vertical configuration, the substrate having at least a front face, a back face, a top edge, a bottom edge, and two lateral edges, the carrier comprising: a. a frame that is dimensionally larger than the substrate, the frame comprising: i. a top section comprising at least one edge and positioned to contact, or indirectly or directly support at least part of the top edge, the front face or the back face of the substrate; A. wherein the top section comprises one or more collection trays, the one or more collection trays comprise a finned object having a length, a width, and a thickness, that protrudes from the top section at an angle θ of from about 20° to about 160° relative to the top section, and wherein the length of the finned object spans at least part of the length of the top section and is approximately parallel to the at least one edge of the top section; ii. a bottom section approximately parallel to the top section, the bottom section positioned to contact, or indirectly or directly support at least part of the bottom edge, the front face or the back face of the substrate; and iii. two lateral sections approximately parallel to each other and approximately orthogonal to the top and bottom sections, each lateral section positioned to contact, or indirectly or directly support at least part of one of the lateral edges, or the front face or the back face of the substrate; b. one or more clamping mechanisms for fixing a glass to at least one of the top, bottom, or lateral sections of the frame; and wherein the carrier is designed so that when a substrate is in the carrier, the substrate is held at an angle θ of from greater than 0° to about 10° forward tilt.