US 11,053,581 B2
Plasma erosion resistant rare-earth oxide based thin film coatings
Jennifer Y. Sun, Mountain View, CA (US); Biraja P. Kanungo, San Jose, CA (US); Vahid Firouzdor, San Mateo, CA (US); and Tom Cho, Los Altos, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 15, 2019, as Appl. No. 16/685,341.
Application 15/814,601 is a division of application No. 14/306,583, filed on Jun. 17, 2014, granted, now 9,850,568, issued on Dec. 26, 2017.
Application 16/685,341 is a continuation of application No. 15/814,601, filed on Nov. 16, 2017, granted, now 10,501,843.
Claims priority of provisional application 61/837,595, filed on Jun. 20, 2013.
Prior Publication US 2020/0087776 A1, Mar. 19, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. B32B 18/00 (2006.01); C23C 14/08 (2006.01); C23C 14/22 (2006.01); H01J 37/32 (2006.01); C23C 14/34 (2006.01)
CPC C23C 14/08 (2013.01) [B32B 18/00 (2013.01); C23C 14/083 (2013.01); C23C 14/22 (2013.01); C23C 14/228 (2013.01); C23C 14/34 (2013.01); H01J 37/32477 (2013.01); H01J 37/32495 (2013.01); Y10T 428/24355 (2015.01); Y10T 428/24967 (2015.01); Y10T 428/24975 (2015.01); Y10T 428/265 (2015.01)] 20 Claims
OG exemplary drawing
 
1. An article comprising:
a ceramic body; and
a first protective layer on at least one surface of the ceramic body, wherein the first protective layer is a thin film having a thickness of approximately 0.5-20 microns that comprises a first ceramic selected from a group consisting of:
Y3Al5O12 having at least two of a volume resistivity of 11.3E16 Ω·cm+/−up to 30%, a dielectric constant of 9.76+/−up to 30%, a thermal conductivity of 20.1 W/m·K+/−up to 30%, a hardness of 8.5 GPa+/−up to 30%, or a hermiticity of 4.4E-10 cm3/s+/−up to 30%,
Er2O3 having a hardness of 5 GPa+/−up to 30%,
Er3Al5O12 having a hardness of 9 GPa+/−up to 30%, and
a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2, the ceramic compound having at least one of a dielectric constant of 9.83+/−up to 30%, a thermal conductivity of 19.9 W/m·K+/−up to 30%, or a hermiticity of 1.2E-9 cm3/s+/−up to 30%.