US 12,349,430 B2
Mixed metal oxide
Michiel Jan van Setten, Heverlee (BE); Hendrik F. W Dekkers, Tienen (BE); Karl Opsomer, Huise—Zingem (BE); Geoffrey Pourtois, Leuven (BE); and Gouri Sankar Kar, Leuven (BE)
Assigned to IMEC vzw, Leuven (BE)
Filed by IMEC vzw, Leuven (BE)
Filed on Jul. 1, 2022, as Appl. No. 17/810,548.
Claims priority of application No. 21183584 (EP), filed on Jul. 3, 2021.
Prior Publication US 2023/0010899 A1, Jan. 12, 2023
Int. Cl. H01L 29/24 (2006.01); C01G 9/00 (2006.01); C01G 15/00 (2006.01); H01L 21/02 (2006.01); H10D 30/67 (2025.01); H10D 62/40 (2025.01); H10D 62/80 (2025.01)
CPC H10D 62/80 (2025.01) [C01G 9/006 (2013.01); C01G 15/006 (2013.01); H01L 21/02565 (2013.01); H01L 21/02592 (2013.01); H01L 21/02631 (2013.01); H10D 30/6755 (2025.01); H10D 62/402 (2025.01); C01P 2002/02 (2013.01); C01P 2002/50 (2013.01); C01P 2006/40 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A mixed metal oxide comprising:
a mixture comprising:
0.30 to 0.69 parts by mole Mg,
0.20 to 0.69 parts by mole Zn,
0.01 to 0.30 parts by mole of a third element selected from Al and Ga, and
at least one other element selected from metals and metalloids other than Mg, Zn and the third element, wherein when the third element is Al, the at least one other element is present at greater than zero and up to 0.31 parts by mole, and wherein when the third element is Ga, the at least one other element is present at greater than zero and up to 0.15 parts by mole;
oxygen; and
less than 0.01 parts by mole of non-metallic and non-metalloid impurities,
wherein a sum of all parts by mole of Mg, Zn, the third element, and the at least one other element amounts to 1.00, and
wherein the amount in parts by mole of the at least one other element is lower than the amount in parts by mole of each of Mg and Zn.