US 12,348,215 B2
Transversely-excited film bulk acoustic resonator using YX-cut lithium niobate for high power applications
Bryant Garcia, Mississauga (CA)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Apr. 12, 2024, as Appl. No. 18/634,626.
Application 18/634,626 is a continuation of application No. 17/693,264, filed on Mar. 11, 2022, granted, now 11,990,888.
Application 17/693,264 is a continuation of application No. 17/022,042, filed on Sep. 15, 2020, granted, now 11,323,090, issued on May 3, 2022.
Application 17/022,042 is a continuation in part of application No. 16/829,617, filed on Mar. 25, 2020, granted, now 10,868,512, issued on Dec. 15, 2020.
Application 17/022,042 is a continuation in part of application No. 16/782,971, filed on Feb. 5, 2020, granted, now 10,790,802, issued on Sep. 29, 2020.
Application 16/829,617 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/829,617 is a continuation of application No. 16/578,811, filed on Sep. 23, 2019, granted, now 10,637,438, issued on Apr. 28, 2020.
Application 16/782,971 is a continuation in part of application No. 16/438,141, filed on Jun. 11, 2019, granted, now 10,601,392, issued on Mar. 24, 2020.
Application 16/438,141 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/578,811 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 63/026,824, filed on May 19, 2020.
Claims priority of provisional application 62/904,133, filed on Sep. 23, 2019.
Claims priority of provisional application 62/818,564, filed on Mar. 14, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/753,809, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2024/0258993 A1, Aug. 1, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/17 (2006.01); H03H 9/02 (2006.01); H03H 9/54 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/171 (2013.01) [H03H 9/02 (2013.01); H03H 9/54 (2013.01); H03H 9/02015 (2013.01); H03H 9/13 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a substrate;
a lithium niobate layer attached to the substrate directly or via one or more intermediate layers; and
an interdigital transducer (IDT) at a surface of the lithium niobate layer,
wherein a thickness of at least one interleaved finger of the interleaved fingers of the IDT is greater than or equal to 0.8 times a thickness of the lithium niobate layer and less than or equal to 2.0 times the thickness of the lithium niobate layer, and
wherein the IDT is configured such that a radio frequency signal applied to the IDT excites a primary acoustic mode in the lithium niobate layer, and a direction of acoustic energy flow of the primary acoustic mode is substantially orthogonal to the surface of the lithium niobate layer.