US 12,348,213 B2
Dual proof-mass resonators with low support loss
Amir Rahafrooz, Shaker Heights, OH (US); and Diego Emilio Serrano, Alpharetta, GA (US)
Assigned to Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
Filed by Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
Filed on Dec. 2, 2022, as Appl. No. 18/061,234.
Prior Publication US 2024/0186975 A1, Jun. 6, 2024
Int. Cl. H03H 9/02 (2006.01); H03H 9/24 (2006.01)
CPC H03H 9/02433 (2013.01) [H03H 9/2452 (2013.01); H03H 2009/0244 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A mechanical resonator comprising:
two identical proof-masses adapted to oscillate in a same phase in a direction perpendicular to a direction of at least one connecting beam, the at least one connecting beam connecting the two identical proof-masses; and
at least one anchor attached to a middle of the at least one connecting beam,
wherein the at least one connecting beam comprises an outer ring at a middle thereof, and
wherein the at least anchor is disposed at a center of the outer ring and is connected to the outer ring via two sub-connecting beams.