US 12,347,719 B2
Floating pin for substrate transfer
Sreenath Sovenahalli, Bangalore (IN); Kirankumar Neelasandra Savandaiah, Bangalore (IN); Bhaskar Prasad, Jamshedpur (IN); Srinivasa Rao Yedla, Bangalore (IN); and Thomas Brezoczky, Los Gatos, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Appl. No. 17/923,908
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Apr. 12, 2021, PCT No. PCT/US2021/026793
§ 371(c)(1), (2) Date Nov. 7, 2022,
PCT Pub. No. WO2021/231008, PCT Pub. Date Nov. 18, 2021.
Application 17/923,908 is a continuation of application No. 16/875,750, filed on May 15, 2020, abandoned.
Prior Publication US 2023/0178416 A1, Jun. 8, 2023
Int. Cl. H01L 21/68 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/68742 (2013.01) 17 Claims
OG exemplary drawing
 
1. A floating pin for positioning a substrate relative to a substrate support, the floating pin comprising:
a shaft configured to move through a guide hole in the substrate support; and
a pin head comprising a top surface and a flat shoulder surface disposed between the top surface and the shaft, wherein
the flat shoulder surface is configured to be seated on a recessed surface of the substrate support and seal the guide hole of the substrate support, and
the pin head comprises:
a shoulder portion that includes the flat shoulder surface; and
a countersunk portion that includes the top surface having a larger diameter than the flat shoulder surface, the countersunk portion having a beveled surface extending from an exterior sidewall surface of the shoulder portion to the top surface.