US 12,347,712 B2
Substrate container with built-in negative pressure cavity
Ming-Chien Chiu, New Taipei (TW); Chia-Ho Chuang, New Taipei (TW); Kuo-Hua Lee, New Taipei (TW); Xin-Yuan Huang, New Taipei (TW); En-Nien Shen, New Taipei (TW); and Jyun-Ming Lyu, New Taipei (TW)
Assigned to GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW)
Filed by GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW)
Filed on Nov. 23, 2022, as Appl. No. 17/992,986.
Claims priority of provisional application 63/397,004, filed on Aug. 11, 2022.
Prior Publication US 2024/0055287 A1, Feb. 15, 2024
Int. Cl. H01L 21/673 (2006.01)
CPC H01L 21/67389 (2013.01) [H01L 21/67386 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A substrate container, comprising:
a shell, defining an accommodation space, and having a bottom and at least one exhaust hole formed on the bottom, wherein the exhaust hole is adjacent to an opening of the shell;
a cover member, mounted to the bottom of the shell, the cover member and the bottom of the shell defining a negative pressure cavity above and communicating with the at least one exhaust hole; and
an elongated exhaust hole, defined above the negative pressure cavity, and communicating with the negative pressure cavity and the accommodation space;
wherein, a gas in the accommodation space is exhausted sequentially from the elongated exhaust hole, the negative pressure cavity and the at least one exhaust hole.