| CPC H01L 21/67253 (2013.01) [G01N 15/06 (2013.01); G01N 15/0656 (2013.01); H01L 21/67017 (2013.01); H01L 21/67248 (2013.01); G01N 25/18 (2013.01)] | 24 Claims |

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1. A method of detecting accumulation of material deposits within a fluid flow conduit, the method comprising:
providing, by a controller, an excitation signal to a heating element of the fluid flow conduit and a second heating element of the fluid flow conduit, wherein the excitation signal has a predetermined electrical power, the heating element is provided proximate to a first location of the fluid flow conduit, and the second heating element is provided proximate to a second location of the fluid flow conduit;
obtaining a first temperature and a second temperature of the fluid flow conduit in response to providing the excitation signal, wherein the first temperature is associated with the first location, and the second temperature is associated with the second location;
obtaining, by the controller, thermodynamic data of the fluid flow conduit in response to providing the excitation signal, wherein the thermodynamic data includes heat flux data, diffusivity data, time data, temperature differential data, or a combination thereof; and
determining, by the controller, an amount of material deposits based on the thermodynamic data.
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