US 12,347,697 B2
Prewet module and prewet method
Masaya Seki, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Appl. No. 17/761,841
Filed by EBARA CORPORATION, Tokyo (JP)
PCT Filed May 31, 2021, PCT No. PCT/JP2021/020614
§ 371(c)(1), (2) Date Dec. 8, 2022,
PCT Pub. No. WO2022/254486, PCT Pub. Date Dec. 8, 2022.
Prior Publication US 2024/0047235 A1, Feb. 8, 2024
Int. Cl. H01L 21/67 (2006.01); C25D 7/12 (2006.01)
CPC H01L 21/67051 (2013.01) [C25D 7/12 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A pre-wet module comprising:
a stage configured to hold a back surface of a substrate with a surface to be processed facing upward;
a rotation mechanism configured to rotate the stage;
a pre-wet chamber including a lid member and a tubular member, the lid member having an opposed surface opposed to the surface to be processed of the substrate, the tubular member being installed on an outer edge portion of the opposed surface of the lid member;
an elevating mechanism configured to move up and down the pre-wet chamber;
a degassing liquid supply member configured to supply a degassing liquid to a pre-wet space formed between the pre-wet chamber and the surface to be processed of the substrate;
a nozzle installed on the opposed surface of the lid member;
a cleaning liquid supply member configured to supply a cleaning liquid to the surface to be processed of the substrate via the nozzle,
a vent pipe configured to communicate the pre-wet space with an outside of the pre-wet chamber via the lid member,
a vent valve configured to open and close the vent pipe,
a discharge pipe for discharging the degassing liquid stored in the pre-wet space;
a discharge valve configured to open and close the discharge pipe;
a bypass pipe configured to connect the vent pipe to the discharge pipe; and
a bypass valve configured to open and close the bypass pipe.