US 12,347,639 B2
Method and systems useful for producing aluminum ions
Ying Tang, Brookfield, CT (US); Joseph R. Despres, Middletown, CT (US); Joseph D. Sweeney, New Milford, CT (US); Oleg Byl, Southbury, CT (US); and Barry Lewis Chambers, Hot Springs Village, AR (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Dec. 11, 2023, as Appl. No. 18/536,031.
Application 18/536,031 is a continuation of application No. 17/492,089, filed on Oct. 1, 2021, granted, now 11,881,376.
Claims priority of provisional application 63/086,799, filed on Oct. 2, 2020.
Prior Publication US 2024/0136145 A1, Apr. 25, 2024
Int. Cl. H01J 37/08 (2006.01); H01J 37/32 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/08 (2013.01) [H01J 37/32532 (2013.01); H01J 37/3171 (2013.01); H01J 2237/31701 (2013.01)] 6 Claims
OG exemplary drawing
 
1. An ion source apparatus capable of generating an ion mixture that contains aluminum ions, the apparatus comprising:
an ion source chamber comprising an interior and an interior structure that comprises aluminum target,
a source of fluorine-containing gas in fluid communication with the interior, the fluorine-containing gas selected from BF3, PF3, PF5, GeF4, XeF2, CF4 B2F4, SiF4, Si2F6, AsF3, AsF5, XeF4, XeF6, WF6, MoF6, CnF2n+2, CnF2n, CnF2n−2, CnHxF2n+2−x, CnHxF2n−x, CnHxF2n−2−x (n=1, 2, 3 . . . , x=0, 1, 2 . . . ), COF2, SF6, SF4, SeF6, NF3, N2F4, HF, F2, or a combination thereof,
a source of hydrogen-containing gas in fluid communication with the interior, wherein the hydrogen containing gas is flowed to the ion source in an amount that is 10 to 30 percent to a maximum beam current; and aluminum ions are generated within the ion source chamber.