US 12,347,628 B1
Stackable and embeddable vertical capacitors in semiconductor devices and method of fabrication
Ryan Wong, Atlanta, GA (US); Carlos Andres Riera Cercado, Atlanta, GA (US); Richard Sheridan, Gilbert, AZ (US); and Imran Khan, Alpharetta, GA (US)
Assigned to Saras Micro Devices, Inc., Chandler, AZ (US)
Filed by Saras Micro Devices, Inc., Chandler, AZ (US)
Filed on Aug. 27, 2024, as Appl. No. 18/816,975.
Int. Cl. H01G 4/38 (2006.01); H01L 23/64 (2006.01); H10D 1/00 (2025.01); H10D 1/68 (2025.01); H10D 84/00 (2025.01); H01G 4/232 (2006.01); H01G 4/30 (2006.01)
CPC H01G 4/38 (2013.01) [H01L 23/642 (2013.01); H10D 1/043 (2025.01); H10D 1/714 (2025.01); H10D 84/212 (2025.01); H01G 4/232 (2013.01); H01G 4/30 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for fabricating a stacked vertical capacitor device, the method comprising:
embedding within a substrate a vertical capacitor element including a first polarity electrode, a second polarity electrode vertically disposed relative to the first polarity electrode, and a central capacitance region disposed between the first polarity electrode and the second polarity electrode, the vertical capacitor element having a first orientation;
laminating the vertical capacitor element with an embedding material;
exposing metallization surfaces of the vertical capacitor element;
defining one or more vias through a cross section of the substrate;
electroplating a top terminal metal plane and a bottom terminal metal plane onto the first polarity electrode and the second polarity electrode of the vertical capacitor element, and the via; and
isolating, on the top terminal metal plane, a top first polarity terminal and a top second polarity terminal, and on the bottom terminal metal plane, a bottom first polarity terminal and a bottom second polarity terminal, a first one of the vias connecting the top first polarity terminal and the bottom first polarity terminal and a second one of the vias connecting the top second polarity terminal and the bottom second polarity terminal.