US 12,346,645 B2
Semiconductor device and method and system of arranging patterns of the same
Anurag Verma, Hsinchu (TW); Meng-Kai Hsu, Hsinchu County (TW); Johnny Chiahao Li, Hsinchu (TW); Sheng-Hsiung Chen, Hsinchu County (TW); Cheng-Yu Lin, Hsinchu County (TW); Hui-Zhong Zhuang, Kaohsiung (TW); and Jerry Chang Jui Kao, Taipei (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Feb. 17, 2022, as Appl. No. 17/674,585.
Prior Publication US 2023/0259686 A1, Aug. 17, 2023
Int. Cl. G06F 30/392 (2020.01); H10D 89/10 (2025.01)
CPC G06F 30/392 (2020.01) [H10D 89/10 (2025.01)] 20 Claims
OG exemplary drawing
 
1. A method of arranging patterns of a semiconductor device, the method comprising:
generating a plurality of gate patterns corresponding to a set of gate structures of the semiconductor device and a plurality of conductive patterns corresponding to a set of metal diffusion (MD) conductive features of the semiconductor device, wherein each of the plurality of gate patterns and conductive patterns is located at a first horizontal level and extends along a first direction;
selecting one of the gate patterns as an input pin or one of the conductive patterns as an output pin; and
generating, based on a selected gate pattern or a selected conductive pattern, a plurality of metallization patterns corresponding to a set of first metallization layers of the semiconductor device, wherein each of the plurality of metallization patterns is located at a second horizontal level overlying the first horizontal level and extends along a second direction substantially perpendicular to the first direction.