US 12,346,090 B2
Process control device in manufacturing
Fatma Arzum Simsek-Ege, Boise, ID (US); Shruthi Kumara Vadivel, Boise, ID (US); Deepti Verma, Boise, ID (US); Anshika Sharma, Boise, ID (US); Lavanya Sriram, Boise, ID (US); and Trupti D. Gawai, Boise, ID (US)
Assigned to Micron Technology, Inc., Boise, ID (US)
Filed by Micron Technology, Inc., Boise, ID (US)
Filed on Jul. 11, 2022, as Appl. No. 17/861,374.
Application 17/861,374 is a continuation of application No. 16/997,717, filed on Aug. 19, 2020, granted, now 11,385,618.
Prior Publication US 2022/0342386 A1, Oct. 27, 2022
Int. Cl. G05B 19/4093 (2006.01); G05B 19/418 (2006.01)
CPC G05B 19/40938 (2013.01) [G05B 19/4187 (2013.01); G05B 2219/35513 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving, data, including a detected number of particles, at a process control device affixed to a first manufacturing tool in a manufacturing line;
determining a second manufacturing tool is creating an excess number of particles at least partially based on the detected number of particles;
transmitting a command from the process control device at least partially based on the data; and
performing at least one of: preventative maintenance on the second manufacturing tool, stopping an operation at the second manufacturing tool, or bypassing the second manufacturing tool in the manufacturing line in response to receiving the command.