US 12,346,034 B2
Method and system of removing particles from pellicle
Cheng-Kang Hu, Hsinchu (TW); Yin Yuan Chen, Hsinchu (TW); Ya-Chieh Wen, Hsinchu (TW); Hsu-Shui Liu, Hsinchu (TW); and Jiun-Rong Pai, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on Apr. 21, 2023, as Appl. No. 18/138,012.
Prior Publication US 2024/0353767 A1, Oct. 24, 2024
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70925 (2013.01) [G03F 7/70983 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of removing a particle from a pellicle, comprising:
moving a nozzle over a surface of a membrane of the pellicle to a location of the particle, wherein the nozzle is in fluid connection with a supply of a liquid material;
dispensing a droplet of the liquid material from the nozzle on and covering the particle;
with the nozzle in contact with the droplet on the membrane, dragging the droplet and the particle by the nozzle toward an edge of the membrane using a surface tension of the droplet; and
sucking off the droplet and the particle by a vacuum pump from the edge of the membrane.