US 12,346,033 B2
Optical system
Rolf Freimann, Aalen (DE); Juergen Baier, Oberkochen (DE); and Steffen Fritzsche, Aalen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Apr. 12, 2022, as Appl. No. 17/718,868.
Application 16/510,055 is a division of application No. 15/835,922, filed on Dec. 8, 2017, granted, now 10,386,733.
Application 17/718,868 is a continuation of application No. 16/510,055, filed on Jul. 12, 2019, abandoned.
Application 15/835,922 is a continuation of application No. PCT/EP2016/064086, filed on Jun. 17, 2016.
Claims priority of application No. 102015211286.1 (DE), filed on Jun. 18, 2015.
Prior Publication US 2022/0236652 A1, Jul. 28, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G03F 7/00 (2006.01); G02B 7/182 (2021.01)
CPC G03F 7/70825 (2013.01) [G02B 7/1828 (2013.01); G03F 7/70241 (2013.01); G03F 7/70258 (2013.01); G03F 7/70275 (2013.01); G03F 7/70316 (2013.01); G03F 7/70833 (2013.01); G03F 7/70 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An optical system, comprising:
a first module, comprising:
a first mirror;
a first modular sensor frame;
a first sensor configured to capture a position and/or a spatial orientation of the first mirror relative to the first modular sensor frame; and
a first actuator configured to position and/or orient the first mirror;
a second module, comprising:
a second mirror;
a second modular sensor frame;
a second sensor configured to capture a position and/or a spatial orientation of the second mirror relative to the second modular sensor frame; and
a second actuator configured to position and/or orient the second mirror;
a force frame connected to the first and second modules so that the first and second modules are removable from the optical system;
a sensor frame decoupled from the force frame;
a third sensor configured to capture a position and/or spatial orientation of the first modular sensor frame relative to the sensor frame;
a fourth sensor configured to capture a position and/or spatial orientation of the second modular sensor frame relative to the sensor frame;
a first optical control loop configured to regulate a position and/or a spatial orientation of the first mirror relative to the first modular sensor frame; and
a second optical control loop configured to regulate a position and/or a spatial orientation of the second mirror relative to the second modular sensor frame,
wherein:
the force frame encloses a volume; and
the sensor frame is at least partially arranged within the volume.