CPC G03F 7/706835 (2023.05) [G03F 7/706843 (2023.05); G03F 7/7085 (2013.01); G03F 7/70858 (2013.01); G03F 7/70933 (2013.01)] | 20 Claims |
1. A system comprising:
a measurement device configured to measure a beam and to determine a signal based on the measured beam; and
a fluid supply device configured to provide fluid as a fluid stream to, or surrounding, the beam,
wherein the system is configured to calculate noise of the signal, and to adjust, based on the calculated noise, a parameter of the fluid of the fluid stream.
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