| CPC G03F 1/62 (2013.01) | 20 Claims |
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1. A method for forming a pellicle for an extreme ultraviolet lithography, comprising:
forming a pellicle membrane over a filter membrane, wherein forming the pellicle membrane comprises:
growing carbon nanotubes (CNTs) from in-situ formed metal catalyst particles in a first reaction zone of a reactor, each of the CNTs including a metal catalyst particle at a growing tip thereof;
growing boron nitride nanotubes (BNNTs) to surround individual CNTs in a second reaction zone of the reactor downstream of the first reaction zone, thereby forming heterostructure nanotubes each including a CNT core and a BNNT shell, wherein the metal catalyst particles are partially or completely removed during growing the BNNTs; and
collecting the heterostructure nanotubes on the filter membrane; and
transferring the pellicle membrane from the filter membrane to a membrane border.
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