US 12,346,020 B2
Optical assembly with coating and methods of use
Pei-Cheng Hsu, Hsinchu (TW); Ping-Hsun Lin, Hsinchu (TW); Ta-Cheng Lien, Hsinchu (TW); and Hsin-Chang Lee, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Sep. 21, 2021, as Appl. No. 17/481,010.
Claims priority of provisional application 63/149,108, filed on Feb. 12, 2021.
Prior Publication US 2022/0260932 A1, Aug. 18, 2022
Int. Cl. G03F 1/62 (2012.01); C23C 16/455 (2006.01); G03F 7/00 (2006.01)
CPC G03F 1/62 (2013.01) [C23C 16/45525 (2013.01); G03F 7/70033 (2013.01); G03F 7/70983 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical assembly, comprising:
a matrix of a plurality of nanotubes bundles, the plurality of nanotube bundles including nanotube bundles including nanotubes consisting of carbon atoms, nanotube bundles including nanotubes of carbon atoms and nitrogen atoms and nanotube bundles including nanotubes of carbon atoms and silicon atoms; and
a coating layer on the plurality of nanotube bundles, the coating layer surrounding individual nanotubes of the individual nanotube bundles and comprising a material selected from the group consisting of niobium monosilicide (NbSi), niobium silicide (NbSi2), niobium silicon nitride (NbSiN), niobium titanium nitride (NbTixNy), molybdenum silicon nitride (MoSixNy), yttrium fluoride (YF), titanium carbon nitride (TiCxNy), and hafnium fluoride (HfF4).