| CPC G01N 33/24 (2013.01) [A01B 79/005 (2013.01); B01L 3/50273 (2013.01); B01L 3/502738 (2013.01); F04B 19/006 (2013.01); B01L 2200/0605 (2013.01); B01L 2300/0816 (2013.01); B01L 2300/0877 (2013.01); B01L 2300/0883 (2013.01); B01L 2300/0887 (2013.01); F04B 13/02 (2013.01); F04B 43/073 (2013.01); F16K 99/0015 (2013.01); F16K 99/0059 (2013.01); F16K 2099/0084 (2013.01); G01N 33/245 (2024.05)] | 19 Claims |

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1. A microfluidic manifold for processing an agricultural slurry comprising:
a micropump formed between a liquid layer and an air layer of the manifold, the micropump comprising a pump chamber collectively formed by an air-side recess and a liquid-side recess, and a resiliently deformable diaphragm separating the air-side and liquid-side recesses;
the liquid layer further comprising a perimeter flow groove extending circumferentially around peripheral portions of the pump chamber.
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