US 12,345,653 B2
Defect inspection apparatus
Hiroshi Horikawa, Kyoto (JP); and Kenji Takubo, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 18/013,401
Filed by Shimadzu Corporation, Kyoto (JP)
PCT Filed Jul. 2, 2020, PCT No. PCT/JP2020/026071
§ 371(c)(1), (2) Date Dec. 28, 2022,
PCT Pub. No. WO2022/003916, PCT Pub. Date Jan. 6, 2022.
Prior Publication US 2023/0251204 A1, Aug. 10, 2023
Int. Cl. G01N 21/88 (2006.01); G01B 9/02 (2022.01); G01B 9/02098 (2022.01); G01N 29/04 (2006.01); G01N 21/17 (2006.01)
CPC G01N 21/8806 (2013.01) [G01B 9/02095 (2013.01); G01B 9/02098 (2013.01); G01N 29/045 (2013.01); G01N 2021/1765 (2013.01); G01N 2201/06113 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A defect inspection apparatus comprising:
an excitation unit configured to excite an elastic wave in an inspection target;
a laser illumination unit configured to irradiate the inspection target with laser light;
an interference unit configured to cause the laser light reflected from mutually different positions of the inspection target excited by the excitation unit to interfere;
an imaging unit configured to image interfered laser light;
a holding member configured to hold the imaging unit at a position spaced apart from the inspection target by a predetermined distance;
a connecting member configured to connect the holding member or the imaging unit and the excitation unit;
a controller configured to generate an image related to propagation of the elastic wave of the inspection target, based on the interfered laser light imaged by the imaging unit, and
a vibration absorbing member provided between the excitation unit and the imaging unit, the vibration absorbing member being configured to absorb vibrations from the excitation unit.