| CPC G01N 21/88 (2013.01) [G01N 2201/06113 (2013.01)] | 17 Claims |
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1. A method for inspection of a subject article, comprising the steps of:
providing a plurality of beam trajectories for beams of electromagnetic radiation, said plurality of beam trajectories being arranged in a dispersed configuration that is decomposable into a partition of groups of beam trajectories, each of said groups including at least one beam trajectory, distances between said beam trajectories in groups including more than one beam trajectory being not less than a predetermined value which is greater than at least one of the distances between said beam trajectories in said plurality of beam trajectories; and
successively activating each of said groups so as to cause said beams of electromagnetic radiation to be transmitted along said beam trajectories of said group while positioning said subject article in said plurality of beam trajectories, and sensing the electromagnetic radiation from each of said beams that have been transmitted through or reflected from said subject article.
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