US 12,345,642 B2
Optical system, and method of illuminating a sample plane
Ronian Siew, Vancouver (CA); Sheau Yeng Wei, Singapore (SG); and Ju-Sung Hung, Palo Alto, CA (US)
Assigned to Advanced Instrument Pte. Ltd., Singapore (CN); and Combinati Incorporated, Palo Alto, CA (US)
Filed by ADVANCED INSTRUMENT PTE. LTD., Singapore (SG); and COMBINATI INCORPORATED, Palo Alto, CA (US)
Filed on Jan. 27, 2023, as Appl. No. 18/160,718.
Application 18/160,718 is a continuation of application No. 16/651,312, granted, now 11,567,007, previously published as PCT/SG2019/050350, filed on Jul. 19, 2019.
Prior Publication US 2023/0384221 A1, Nov. 30, 2023
Int. Cl. G01N 21/64 (2006.01); G01N 21/03 (2006.01)
CPC G01N 21/6428 (2013.01) [G01N 21/6452 (2013.01); G01N 21/6456 (2013.01); G01N 2021/0325 (2013.01); G01N 2021/6439 (2013.01); G01N 2021/6478 (2013.01); G01N 2201/062 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of illuminating a sample plane, the method comprising:
generating an adjusted illumination distribution on the sample plane by adjusting an illumination subsystem from a first tilt position to a second tilt position, the illumination subsystem being adjusted about a pivot point between an optical light source of the illumination subsystem and the sample plane along a first optic axis of the illumination subsystem,
the first optic axis being at an incident angle greater than 0° and less than 90° to a normal of the sample plane, and
the illumination subsystem having a second optic axis when the illumination subsystem is in the second tilt position;
wherein intensity distribution of the adjusted illumination distribution is more symmetrical than that of a reference illumination distribution generated by the illumination subsystem when the illumination subsystem is in the first tilt position.