US 12,345,640 B2
Systems and methods for the in-line measurement of alkali metal-containing structures and alkali ion-containing structures
Subramanya P. Herle, Mountain View, CA (US)
Assigned to Elevated Materials US LLC, Santa Clara, CA (US)
Filed by Elevated Materials US LLC, Santa Clara, CA (US)
Filed on Nov. 8, 2022, as Appl. No. 17/982,911.
Claims priority of provisional application 63/281,447, filed on Nov. 19, 2021.
Prior Publication US 2023/0160821 A1, May 25, 2023
Int. Cl. G01N 21/63 (2006.01); G01N 21/88 (2006.01); G01N 21/84 (2006.01)
CPC G01N 21/63 (2013.01) [G01N 21/88 (2013.01); G01N 2021/8416 (2013.01); G01N 2201/125 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A system for processing an electrode comprising an alkali metal containing structure with opposed first and second edges, the system comprising:
a first processing chamber for forming an electrode comprising an alkali metal containing structure, wherein alkali metal is coated on the alkali metal containing structure; and
a metrology station coupled to and in-line with the first processing chamber, the metrology station comprising:
a source of radiation for delivering radiation to and ablating the alkali metal containing structure at a first location between the opposed first and second edges and at a second location between the first location and one of the first and second edges;
an optical detector for receiving an emission of radiation emitted from the alkali metal containing structure, the optical detector further comprising a diffraction grating configured to separate the radiation emitted into element-specific wavelengths; and
a processor configured to determine a thickness of the alkali metal containing structure of the electrode based on the emission of radiation, the processor configured to record a change in intensity of one or more selected wavelengths of the radiation emitted from the alkali metal over time at the first location;
wherein the optical detector detects an emission spectral intensity of laser-ablated alkali metal; and
the processor analyzes the emission spectral intensity of laser-ablated alkali metal.