CPC G01N 1/2205 (2013.01) [G01N 2015/0046 (2013.01); G01N 15/06 (2013.01)] | 16 Claims |
1. A flow path device, comprising:
a first device including a groove and an entry hole aligned with the groove in a thickness direction of the flow path device;
a second device including a first surface, a second surface opposite to the first surface and in contact with the first device, and a first hole extending through and between the first surface and the second surface, the first hole being continuous and aligned with the entry hole in the thickness direction; and
a third device including a third surface in contact with the first surface, a second hole open in the third surface, the second hole being continuous and aligned with the first hole in the thickness direction, and a flow path directly connected with the second hole and open in the third surface,
wherein as viewed in a first direction from the first surface to the second surface along the thickness direction,
the second hole has a diameter greater than a dimension of the flow path in a third direction orthogonal to a second direction in which the flow path extends,
the first hole has a diameter greater than the diameter of the second hole,
the second hole has a center surrounded by the first hole, and
the flow path intersects with the first hole at not more than one point or does not intersect with the first hole.
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