US 12,345,593 B2
Pressure sensor structure, pressure sensor device, and method of manufacturing pressure sensor structure
Kaoru Kishigui, Nagaokakyo (JP); and Koichi Yoshida, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jan. 5, 2023, as Appl. No. 18/093,354.
Application 18/093,354 is a continuation of application No. PCT/JP2021/026151, filed on Jul. 12, 2021.
Claims priority of application No. 2020-124567 (JP), filed on Jul. 21, 2020.
Prior Publication US 2023/0146158 A1, May 11, 2023
Int. Cl. G01N 9/00 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01)
CPC G01L 9/0072 (2013.01) [B81B 7/0048 (2013.01); B81B 7/0058 (2013.01); B81B 7/0064 (2013.01); B81C 1/00333 (2013.01); G01L 19/069 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/04 (2013.01); B81C 2203/0118 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A pressure sensor structure to detect a change in interelectrode electrostatic capacitance, the pressure sensor structure comprising:
a sensor body including:
a diaphragm plate that functions as a sense electrode;
a base electrode that faces the diaphragm plate; and
a sidewall layer to maintain a gap between the diaphragm plate and the base electrode; and
a conductive guard substrate to support the sensor body; wherein
the sidewall layer includes a guard electrode layer and upper and lower guard electrode insulating layers to electrically insulate the guard electrode layer;
the guard substrate is electrically connected to the guard electrode layer to function as a guard electrode together with the guard electrode layer;
an electrically insulating layer to electrically insulate the guard substrate is between the guard substrate and the sensor body; and
between the electrically insulating layer and the sensor body, a second base electrode and a second guard electrode layer are provided in a same layer and electrically isolated from each other.