US 12,345,592 B2
Sensor, device, system, and manufacturing method for product
Satoshi Mashiko, Ibaraki (JP); Haruhiko Horiguchi, Tokyo (JP); Akira Yajima, Saitama (JP); Takayuki Ogawara, Kanagawa (JP); Shuuichi Sato, Kanagawa (JP); Kohei Oyu, Kanagawa (JP); Haruyasu Ishikawa, Saitama (JP); Shoji Sasaki, Kanagawa (JP); Yoshiyuki Beniya, Chiba (JP); Yu Takahashi, Kanagawa (JP); and Yoshiharu Irei, Kanagawa (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 25, 2022, as Appl. No. 18/049,531.
Claims priority of application No. 2021-175762 (JP), filed on Oct. 27, 2021; application No. 2021-175763 (JP), filed on Oct. 27, 2021; application No. 2021-185817 (JP), filed on Nov. 15, 2021; and application No. 2021-213786 (JP), filed on Dec. 28, 2021.
Prior Publication US 2023/0129177 A1, Apr. 27, 2023
Int. Cl. G01L 5/00 (2006.01)
CPC G01L 5/009 (2013.01) 50 Claims
OG exemplary drawing
 
1. A sensor comprising:
a structure; and
a detector arranged to detect a deformation of the structure, wherein
the structure has at least four elastic sections discretely disposed in an imaginary plane,
the structure includes at least one metal component formed by bending a metal member,
the one metal component has a top surface section disposed on one side of the plane and facing the plane, a bottom surface section disposed on the other side of the plane and facing the plane, and at least one elastic section of the four elastic sections, and
the detector is arranged to output a signal according to a relative displacement between the top surface section and the bottom surface section in a direction along the plane,
wherein the one metal component is defined as a first metal component, the structure includes a second metal component, the second metal component has at least one plastic section of the four elastic sections, different from the one elastic section of the first metal component.