US 12,345,584 B2
Static force resistance pressure sensor
Yi-Han Chang, Hsinchu (TW); Chung-Chin Huang, Hsinchu (TW); Wen-Yuan Li, Hsinchu (TW); and Wen-Chung Huang, Hsinchu (TW)
Assigned to AUO Corporation, Hsinchu (TW)
Filed by AUO Corporation, Hsinchu (TW)
Filed on Dec. 28, 2022, as Appl. No. 18/090,475.
Claims priority of application No. 111149091 (TW), filed on Dec. 21, 2022.
Prior Publication US 2024/0210258 A1, Jun. 27, 2024
Int. Cl. G01L 1/22 (2006.01)
CPC G01L 1/2293 (2013.01) 14 Claims
OG exemplary drawing
 
1. A pressure sensor, comprising:
a substrate;
a pressure sensing element, located on the substrate, wherein the pressure sensing element comprises:
a first resistor and a second resistor connected in series;
a third resistor and a fourth resistor connected in series, wherein the first resistor and the second resistor are connected in parallel to the third resistor and the fourth resistor;
a first switch component, electrically connected between the first resistor and the second resistor; and
a second switch component, electrically connected between the third resistor and the fourth resistor;
a first signal line, electrically connected between the first resistor and the fourth resistor;
a second signal line, electrically connected between the second resistor and the third resistor;
an elastomer, located on the substrate and comprising a cavity, wherein the first resistor, the second resistor, the third resistor, and the fourth resistor at least partially overlap with the cavity; and
an opposite substrate, located on the elastomer.