US 12,345,582 B2
Nano film composite strain sensor, preparation method therefor and use thereof
Weiwu Lei, Changsha (CN); Chengyi Xu, Changsha (CN); Jian Xu, Changsha (CN); Sufu Liu, Changsha (CN); and Penghui Zeng, Changsha (CN)
Assigned to Song Nuo Meng Technology Co., Ltd., Changsha (CN)
Filed by Song Nuo Meng Technology Co., Ltd., Changsha (CN)
Filed on Apr. 4, 2023, as Appl. No. 18/130,685.
Claims priority of application No. 202211239996 (CN), filed on Oct. 11, 2022.
Prior Publication US 2023/0236077 A1, Jul. 27, 2023
Int. Cl. G01L 1/22 (2006.01)
CPC G01L 1/2287 (2013.01) 10 Claims
OG exemplary drawing
 
1. A nano film composite strain sensor, comprising:
a substrate layer, a surface of which is provided with a transition layer;
the surface of the transition layer being provided with an insulating layer;
a partial surface of the insulating layer being provided with a strain layer;
a remained partial surface of the insulating layer being provided with a protecting layer;
the partial surface of the strain layer being provided with a pad;
the remained partial surface of the strain layer being provided with the protecting layer;
the substrate layer being a stainless steel layer;
the transition layer comprising a niobium oxide layer;
the strain layer consisting of a NiCrMnSi layer and a NiCrAlY layer;
the NiCrMnSi layer being in contact with the insulating layer;
the NiCrAlY layer being in contact with the protecting layer; and
a strain layer module being arranged as a torque measurement module, a stress measurement module and a pressure measurement module.