US 12,344,957 B1
Tungsten-infused aluminum nitride crystals and methods of forming them
Robert T. Bondokov, Watervliet, NY (US); Sean P. Branagan, Green Island, NY (US); Naoki Ishigami, Green Island, NY (US); Thomas Miebach, Malta, NY (US); and Jianfeng Chen, Ballston Lake, NY (US)
Assigned to CRYSTAL IS, INC., Green Island, NY (US)
Filed by CRYSTAL IS, INC., Green Island, NY (US)
Filed on Dec. 8, 2021, as Appl. No. 17/545,171.
Claims priority of provisional application 63/126,655, filed on Dec. 17, 2020.
Int. Cl. C30B 29/40 (2006.01); C30B 23/02 (2006.01); H01L 21/02 (2006.01)
CPC C30B 29/403 (2013.01) [C30B 23/02 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A crystal boule comprising a single-crystalline AlN portion and a plurality of single-crystalline tungsten (W) inclusions disposed within a volume of the crystal boule, wherein a total concentration of W within the crystal boule ranges from 1 ppm to 500 ppm by weight.