US 12,344,928 B2
Electrode and method of producing the electrode
Tomokazu Suetsugi, Ibaraki (JP); Kazuki Sasahara, Ibaraki (JP); and Motoki Haishi, Ibaraki (JP)
Assigned to NITTO DENKO CORPORATION, Ibaraki (JP)
Appl. No. 18/283,593
Filed by NITTO DENKO CORPORATION, Ibaraki (JP)
PCT Filed Mar. 23, 2022, PCT No. PCT/JP2022/013729
§ 371(c)(1), (2) Date Sep. 22, 2023,
PCT Pub. No. WO2022/202941, PCT Pub. Date Sep. 29, 2022.
Claims priority of application No. 2021-048725 (JP), filed on Mar. 23, 2021; and application No. 2022-046632 (JP), filed on Mar. 23, 2022.
Prior Publication US 2024/0167146 A1, May 23, 2024
Int. Cl. G01N 27/30 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/35 (2006.01); H01J 37/32 (2006.01)
CPC C23C 14/0605 (2013.01) [C23C 14/024 (2013.01); C23C 14/35 (2013.01); G01N 27/308 (2013.01); H01J 37/3277 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An electrode comprising: a substrate film, a metal underlying layer, and a conductive carbon layer in this order toward one side in a thickness direction,
wherein a ratio (O/C) of oxygen to carbon at a place 4.5 nm away from a one-side surface of the conductive carbon layer toward the other side in the thickness direction is less than 0.01, and
wherein the ratio (O/C) of oxygen to carbon is measured using X-ray photoelectron spectroscopy.