| CPC C09J 153/025 (2013.01) [C09J 123/02 (2013.01); G03F 1/64 (2013.01); C08K 5/01 (2013.01); C09J 193/04 (2013.01); H01L 21/67359 (2013.01); Y10T 428/2883 (2015.01)] | 12 Claims |
|
1. A mask adhesive comprising:
100 parts by mass of a thermoplastic elastomer (A) in which a loss tangent measured from −80° C. to 200° C. at a frequency of 1 Hz has a maximum value at a temperature of −20° C. to 30° C.;
20 to 150 parts by mass of a tackifier resin (B); and
20 to 150 parts by mass of a process oil (C), wherein
an amount of softening agent selected from the group consisting of polybutene, hydrogenated polybutene, unsaturated polybutene, aliphatic hydrocarbons (excluding the process oil (C)), and acrylic polymers is 0 to 1 part by mass relative to 100 parts by mass of the thermoplastic elastomer (A),
the thermoplastic elastomer (A) is at least one selected from the group consisting of a styrene-based thermoplastic elastomer, a (meth)acrylate-based thermoplastic elastomer, and an olefin-based thermoplastic elastomer,
in the process oil (C), a total of a proportion (% CP) of paraffin carbon and a proportion (% CN) of naphthene carbon is 50% or more,
in a molecular-weight distribution chart obtained by gel permeation chromatography of the process oil (C), a ratio of an area of a region where the molecular-weight is 500 or less is 5% or less,
in the mask adhesive, a loss tangent measured from −80° C. to 200° C. at a frequency of 1 Hz has a maximum value at a temperature of −10° C. to 30° C., and
the mask adhesive has a sulfur content of 300 μg/g or less.
|