US 12,344,527 B2
Graphene functionalization method, apparatus, and functionalized graphene product
Christopher Russo, Swindon (GB); Mathew Peet, Swindon (GB); Katerina Naydenova, Swindon (GB); Steve Scotcher, Swindon (GB); Chris Palmer, Swindon (GB); and David Cattermole, Swindon (GB)
Assigned to MEDICAL RESEARCH COUNCIL AS PART OF UNITED KINGDOM RESEARCH AND INNOVATION, Swindon (GB)
Appl. No. 17/593,837
Filed by United Kingdom Research and Innovation, Swindon (GB)
PCT Filed Mar. 26, 2020, PCT No. PCT/EP2020/058598
§ 371(c)(1), (2) Date Sep. 24, 2021,
PCT Pub. No. WO2020/193719, PCT Pub. Date Oct. 1, 2020.
Claims priority of application No. 1904187 (GB), filed on Mar. 26, 2019.
Prior Publication US 2022/0185674 A1, Jun. 16, 2022
Int. Cl. C01B 32/194 (2017.01); C01B 32/198 (2017.01); C23C 16/26 (2006.01); C23C 16/56 (2006.01); H01J 37/20 (2006.01); H01J 37/26 (2006.01); H01J 37/32 (2006.01)
CPC C01B 32/194 (2017.08) [C01B 32/198 (2017.08); C23C 16/26 (2013.01); C23C 16/56 (2013.01); H01J 37/20 (2013.01); H01J 37/3244 (2013.01); H01J 37/32917 (2013.01); C01P 2004/04 (2013.01); H01J 37/26 (2013.01); H01J 37/321 (2013.01); H01J 2237/3321 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An apparatus for functionalizing graphene or graphene oxide, the apparatus comprising:
a plasma generator;
a vacuum chamber connected to the plasma generator;
a substrate holder, positioned to hold a substrate having a graphene or graphene oxide layer thereon within the vacuum chamber, and having a mounting area configured to have the substrate mounted therein;
a shutter movable between an open position, in which the mounting area of the substrate holder is exposed to the vacuum chamber, and a closed position, in which the mounting area of the substrate holder is concealed;
an injector, for injecting a functionalizing compound into the vacuum chamber; and
a helium source, for supplying helium to the plasma generator.